K. P. Mogilnikov

Determination of pore size distribution in thin films by ellipsometric porosimetry

Mikhaı̈l R. Baklanov, K. P. Mogilnikov, V. G. Polovinkin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 508 citations

Materials Science, Pore Size Distribution, Chemical Engineering +14

Non-destructive characterisation of porous low-k dielectric films

Mikhaı̈l R. Baklanov, K. P. Mogilnikov · Microelectronic Engineering · 2002 · 168 citations

Materials Science, Engineering, Surface Science +5

Structural Characterization of Mesoporous Organosilica Films for Ultralow-<i>k</i> Dielectrics

F.K. de Theije, Ruud Balkenende, Marcel A. Verheijen et al. · The Journal of Physical Chemistry B · 2003 · 109 citations

Materials Science, Chemical Engineering, Dielectric Constant +13

Determination of Young’s Modulus of Porous Low-k Films by Ellipsometric Porosimetry

K. P. Mogilnikov, Mikhaı̈l R. Baklanov · Electrochemical and Solid-State Letters · 2002 · 107 citations

Materials Science, Materials Engineering, Thin Porous Films +13

Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: A comparative study

A. Grill, V. Patel, Kenneth P. Rodbell et al. · Journal of Applied Physics · 2003 · 98 citations

Engineering, Thin Film Process Technology, Vacuum Device +17