K. P. Mogilnikov

Determination of pore size distribution in thin films by ellipsometric porosimetry

Mikhaı̈l R. Baklanov, K. P. Mogilnikov, V. G. Polovinkin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 509 citations

Natural Sciences, Chemical Engineering, Materials Science +17

Non-destructive characterisation of porous low-k dielectric films

Mikhaı̈l R. Baklanov, K. P. Mogilnikov · Microelectronic Engineering · 2002 · 170 citations

Natural Sciences, Materials Engineering, Materials Science +14

Structural Characterization of Mesoporous Organosilica Films for Ultralow-<i>k</i> Dielectrics

F.K. de Theije, Ruud Balkenende, Marcel A. Verheijen et al. · The Journal of Physical Chemistry B · 2003 · 109 citations

Natural Sciences, Materials Engineering, Materials Science +15

Determination of Young’s Modulus of Porous Low-k Films by Ellipsometric Porosimetry

K. P. Mogilnikov, Mikhaı̈l R. Baklanov · Electrochemical and Solid-State Letters · 2002 · 109 citations

Natural Sciences, Materials Engineering, Materials Science +17

Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: A comparative study

A. Grill, V. Patel, Kenneth P. Rodbell et al. · Journal of Applied Physics · 2003 · 98 citations

Natural Sciences, Materials Engineering, Materials Science +17