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9.4K
Citations
275.1K
Authors
632
Location
Novosibirsk, Russia
Also known as ISP SBRAS · Федеральное государственное бюджетное учреждение науки Институт физики полупроводников им. А.В. Ржанова Сибирского отделения Российской академии наук
Institute of Semiconductor Physics is a facility institution in Novosibirsk, Russia known for materials science, natural sciences, and physics.
9.4K
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1–5 of 632
Low dielectric constant materials for microelectronics
Karen Maex, Mikhaı̈l R. Baklanov, Denis Shamiryan et al. · Journal of Applied Physics · 2003 · 1.6K citations
Natural Sciences, Materials Engineering, Materials Science +17
Determination of pore size distribution in thin films by ellipsometric porosimetry
Mikhaı̈l R. Baklanov, K. P. Mogilnikov, V. G. Polovinkin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 509 citations
Natural Sciences, Chemical Engineering, Materials Science +17
Zhiguo Xia, Yuanyuan Zhang, Victor V. Atuchin∥⊥ · The Journal of Physical Chemistry C · 2013 · 425 citations
1–5 of 9.4K