Denis Shamiryan

Low dielectric constant materials for microelectronics

Karen Maex, Mikhaı̈l R. Baklanov, Denis Shamiryan et al. · Journal of Applied Physics · 2003 · 1.6K citations

Dielectrics, Engineering, Electrical Performance +16

Low-k dielectric materials

Denis Shamiryan, Thomas Abell, Francesca Iacopi et al. · Materials Today · 2004 · 377 citations · Full text

Dielectrics, Engineering, Vlsi Design +20

Plasma processing of low-k dielectrics

Mikhaı̈l R. Baklanov, Jean‐François de Marneffe, Denis Shamiryan et al. · Journal of Applied Physics · 2013 · 288 citations

Materials Science, Materials Engineering, Electrical Engineering +12

Comparative study of SiOCH low-<i>k</i> films with varied porosity interacting with etching and cleaning plasma

Denis Shamiryan, Mikhaı̈l R. Baklanov, S. Vanhaelemeersch et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 150 citations

Engineering, Nanoporous Material, Porous Membrane +17

Characterization of Cu surface cleaning by hydrogen plasma

Mikhaı̈l R. Baklanov, Denis Shamiryan, Zs. Tôkei et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 109 citations

Materials Science, Chemical Engineering, Copper Oxide Materials +15