Concepedia

Denis Shamiryan

DS

45

Publications

3.7K

Citations

26

H-Index

2001

Active since

Affiliations

Imec the Netherlands

Denis Shamiryan is an author at IMEC specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMicroelectronicsElectrical EngineeringMaterials EngineeringThin FilmsChemical EngineeringElectrical Insulation

Publications per year

2001–2013

45

Publications

45

Low dielectric constant materials for microelectronics

Karen Maex, Mikhaı̈l R. Baklanov, Denis Shamiryan et al. · Journal of Applied Physics · 2003 · 1.6K citations

Dielectrics, Engineering, Electrical Performance +16

Low-k dielectric materials

Denis Shamiryan, Thomas Abell, Francesca Iacopi et al. · Materials Today · 2004 · 377 citations · Full text

Dielectrics, Engineering, Vlsi Design +20

Plasma processing of low-k dielectrics

Mikhaı̈l R. Baklanov, Jean‐François de Marneffe, Denis Shamiryan et al. · Journal of Applied Physics · 2013 · 288 citations

Materials Science, Materials Engineering, Electrical Engineering +12

Comparative study of SiOCH low-<i>k</i> films with varied porosity interacting with etching and cleaning plasma

Denis Shamiryan, Mikhaı̈l R. Baklanov, S. Vanhaelemeersch et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 150 citations

Engineering, Nanoporous Material, Porous Membrane +17

Characterization of Cu surface cleaning by hydrogen plasma

Mikhaı̈l R. Baklanov, Denis Shamiryan, Zs. Tôkei et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 109 citations

Materials Science, Chemical Engineering, Copper Oxide Materials +15

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