Concepedia

V. Patel

VP

Statistics

Publications

36

Citations

2.7K

H-Index

28

Active since

1987

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

Laboratoire de Tribologie et Dynamique des Systèmes

École Centrale de Lyon

Toshiba (United States)

V. Patel is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsThin FilmsMaterials EngineeringElectrical EngineeringSurface ScienceElectrical InsulationChemistryMicroelectronics

Publications per year

1987–2016

36

Publications

36

Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition

A. Grill, V. Patel · Applied Physics Letters · 2001 · 232 citations

Materials Science, Sicoh Precursors, Engineering +12

Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity

Christopher J. Morath, Humphrey J. Maris, Jerome J. Cuomo et al. · Journal of Applied Physics · 1994 · 207 citations

Materials Science, Diamond-like Carbon, Optical Materials +15

Tribochemistry of diamond-like carbon coatings in various environments

Christophe Donnet, M. Belin, J. Auge et al. · Surface and Coatings Technology · 1994 · 203 citations

Materials Science, Diamond-like Carbon, Engineering +3

Characterization of diamondlike carbon by infrared spectroscopy?

A. Grill, V. Patel · Applied Physics Letters · 1992 · 173 citations

Engineering, Absorption Spectroscopy, Chemistry +16

Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane

A. Grill, V. Patel · Journal of Applied Physics · 1999 · 169 citations

Optical Materials, Engineering, Optoelectronic Devices +18

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