Concepedia

Stephen E. Potts

SE

19

Publications

2K

Citations

15

H-Index

2008

Active since

Affiliations

Eindhoven University of Technology(Current)

University College London

Holst Centre (Netherlands)

Plasma (Macedonia)

Centre National de la Recherche Scientifique

Stephen E. Potts is an author at Eindhoven University of Technology specializing in engineering, materials science, and applied physics.

ORCID

Top concepts

Publications per year

2008–2018

19

Publications

19

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

Harald B. Profijt, Stephen E. Potts, M. C. M. van de Sanden et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 864 citations · Full text

, , +13

Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films

Stephen E. Potts, W. Keuning, E. Langereis et al. · Journal of The Electrochemical Society · 2010 · 172 citations · Full text

Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection

Stephen E. Potts, Lilia Schmalz, M. Fenker et al. · Journal of The Electrochemical Society · 2011 · 110 citations · Full text

Atomic Layer Deposition of Silicon Nitride from Bis(<i>tert</i>-butylamino)silane and N<sub>2</sub> Plasma

Harm C. M. Knoops, Eline M. J. Braeken, Koen de Peuter et al. · ACS Applied Materials & Interfaces · 2015 · 103 citations · Full text

, , +15

Energy-enhanced atomic layer deposition for more process and precursor versatility

Stephen E. Potts, W. M. M. Kessels · Coordination Chemistry Reviews · 2013 · 102 citations

, , +9

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