Concepedia

Koen de Peuter

KD

6

Publications

404

Citations

6

H-Index

2014

Active since

Affiliations

Eindhoven University of Technology(Current)

Oxford Instruments (United Kingdom)

Koen de Peuter is an author at Eindhoven University of Technology specializing in engineering, applied physics, and electrical engineering.

Top concepts

Publications per year

2014–2015

6

Publications

6

Atomic Layer Deposition of Silicon Nitride from Bis(<i>tert</i>-butylamino)silane and N<sub>2</sub> Plasma

Harm C. M. Knoops, Eline M. J. Braeken, Koen de Peuter et al. · ACS Applied Materials & Interfaces · 2015 · 103 citations · Full text

, , +15

Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers

Anne‐Marije Andringa, Alberto Perrotta, Koen de Peuter et al. · ACS Applied Materials & Interfaces · 2015 · 77 citations · Full text

Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time

Harm C. M. Knoops, Koen de Peuter, W. M. M. Kessels · Applied Physics Letters · 2015 · 73 citations · Full text

, , +17

Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride

Chaitanya Krishna Ande, Harm C. M. Knoops, Koen de Peuter et al. · The Journal of Physical Chemistry Letters · 2015 · 65 citations · Full text

Performance overview and outlook of EUV lithography systems

Alberto Pirati, Rudy Peeters, Daniel Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 52 citations

, , +15

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