Concepedia

Aaron Cordes

AC

11

Publications

291

Citations

10

H-Index

2008

Active since

Affiliations

University at Albany, State University of New York(Current)

Applied Materials (Israel)

GlobalFoundries (United States)

National Institute of Standards and Technology

Lawrence Berkeley National Laboratory

Aaron Cordes is an author at University at Albany, State University of New York specializing in applied physics, engineering, and microscopy.

Top concepts

Publications per year

2008–2016

11

Publications

11

Gaps analysis for CD metrology beyond the 22nm node

Benjamin Bunday, Thomas A. Germer, Victor Vartanian et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 72 citations

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Printability of native blank defects and programmed defects and their stack structures

Hyuk Joo Kwon, Jenah Harris-Jones, Ranganath Teki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 47 citations

, , +17

CD-SEM metrology for sub-10nm width features

Benjamin Bunday, Aron Cepler, Aaron Cordes et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 29 citations

, , +20

Experimental validation of 2D profile photoresist shrinkage model

Benjamin Bunday, Aaron Cordes, Andy Self et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 24 citations

, , +21

Phenomenology of electron-beam-induced photoresist shrinkage trends

Benjamin Bunday, Aaron Cordes, John A. Allgair et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 24 citations · Full text

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