Aaron Cordes - Concepedia

Author

Aaron Cordes

University at Albany, State University of New York

Also Known As

A. Cordes, Aaron Cordes, Aaron M. Cordes

Publications

380

Citations

H-Index

Concepts

All Affiliations

University at Albany, State University of New York Applied Materials (Israel)GlobalFoundries (United States)National Institute of Standards and Technology Lawrence Berkeley National Laboratory

About

Aaron Cordes is an author at University at Albany, State University of New York specializing in applied physics, engineering, and microscopy.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	10	10	281
2	Applied Physics	10	10	281
3	Education	2	2	101
4	Medicine	1	1	16
5	Biostatistics	1	1	24

Aaron Cordes

Publications

291

Citations

H-Index

Page 1

	Year	Citations
Gaps analysis for CD metrology beyond the 22nm node Benjamin Bunday, Thomas A. Germer, Victor Vartanian, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringMicroscopyMeasurementEducationDimensional Metrology	2013	72
Printability of native blank defects and programmed defects and their stack structures Hyuk Joo Kwon, Jenah Harris-Jones, Ranganath Teki, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMicroscopyNative Blank DefectsDefect Tolerance	2011	47
CD-SEM metrology for sub-10nm width features Benjamin Bunday, Aron Cepler, Aaron Cordes, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Cd-sem MetrologyEngineeringElectron-beam LithographyMeasurementMicroscopy	2014	29
Experimental validation of 2D profile photoresist shrinkage model Benjamin Bunday, Aaron Cordes, Andy Self, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyExperimental ValidationMicroscopyResist Shrinkage	2011	24
Phenomenology of electron-beam-induced photoresist shrinkage trends Benjamin Bunday, Aaron Cordes, John A. Allgair, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMicroscopyShrinkage ResultsResist Shrinkage	2009	24
Characterization of CD-SEM metrology for iArF photoresist materials Benjamin Bunday, Aaron Cordes, Ndubuisi G. Orji, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Cd-sem MetrologyEngineeringElectron-beam LithographyMicroscopyOptical Testing	2008	23
Electron-beam induced photoresist shrinkage influence on 2D profiles Benjamin Bunday, Aaron Cordes, John A. Allgair, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Electrical EngineeringCd ShrinkageEngineeringWafer Scale ProcessingElectron Beam	2010	21
Time-dependent electron-beam-induced photoresist shrinkage effects Benjamin Bunday, Aaron Cordes, Carsten Hartig, Journal of Micro/Nanolithography MEMS and MOEMS EngineeringElectron MicroscopyPhysicsMicroscopyMeasurement	2012	16
EUV mask multilayer defects and their printability under different multilayer deposition conditions Hyuk Joo Kwon, Jenah Harris-Jones, Aaron Cordes, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringDefect ToleranceExtreme UltravioletBeam LithographyPrinted Electronics	2012	15
Assessment of critical dimension small-angle x-ray scattering measurement approaches for FinFET fabrication process monitoring Charles Settens, Aaron Cordes, Benjamin Bunday, Journal of Micro/Nanolithography MEMS and MOEMS	2014	10

Page 1