Investigation of soft X-ray emission from a gas puff target irradiated with a Nd:YAG laser

Henryk Fiedorowicz, Andrzej Bartnik, M. Szczurek, +9

Optics Communications

X-ray SpectroscopyEngineeringX-ray DiffractionSoft X-ray EmissionX-ray Free-electron Laser +4

Novel Evaluation System for Extreme Ultraviolet Lithography Resist in NewSUBARU

Takeo Watanabe, Hiroo Kinoshita, Noriyuki Sakaya, +2

Japanese Journal of Applied Physics

EngineeringElectron-beam LithographyIon Beam InstrumentationChemistryResist Development +17

Full characterization of a high-gain saturated x-ray laser at 13.9 nm

S. Sebban, Hiroyuki Daido, Noriyuki Sakaya, +10

Physical Review A

X-ray SpectroscopyEngineeringLaser-plasma InteractionLaser PhysicsLaser Applications +17

Mask defect inspection using an extreme ultraviolet microscope

Kazuhiro Hamamoto, Y. Tanaka, S. Y. Lee, +6

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Ultraviolet LightOptical MaterialsEngineeringMicroscopyPhase Defect +16

Cleaning of extreme ultraviolet lithography optics and masks using 13.5nm and 172nm radiation

Kazuhiro Hamamoto, Y. Tanaka, Takeo Watanabe, +7

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Ultraviolet LightShort Wavelength OpticOptical MaterialsEngineeringElectron-beam Lithography +19

Improvement of total quality on EUV mask blanks toward volume production

Tsutomu Shoki, Masaru Mitsui, Minoru Sakamoto, +5

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Materials ScienceMaterials EngineeringOptical MaterialsEngineeringVolume Production +13

Experimental characterization of short-wavelength Ni-like soft-x-ray lasing toward the water window

Hiroyuki Daido, S. Sebban, Noriyuki Sakaya, +13

Journal of the Optical Society of America B

EngineeringLaser ScienceLaser ApplicationsLaser PhysicsHigh-power Lasers +19

Phase Defect Observation Using Extreme Ultraviolet Microscope

Kazuhiro Hamamoto, Yuzuru Tanaka, Takahiro Yoshizumi, +6

Japanese Journal of Applied Physics

EngineeringElectron-beam LithographyMicroscopyOptical TestingInternal Reflectivity Distribution +16

Actinic Mask Inspection Using an EUV Microscope –Preparation of a Mirau Interferometer for Phase-Defect Detection–

Kazuhiro Hamamoto, Yuzuru Tanaka, Hirotake Kawashima, +7

Japanese Journal of Applied Physics

Actinic Mask InspectionExtreme Ultraviolet LithographyMask InspectionOphthalmologyMicroscopy +13

X-ray emission from laser-irradiated gold targets with surface modulation

T. Desai, Hiroyuki Daido, Masatoshi Suzuki, +3

Laser and Particle Beams

Materials SciencePlanar TargetOptical MaterialsX-ray SpectroscopyEngineering +13