Noriyuki Sakaya

Investigation of soft X-ray emission from a gas puff target irradiated with a Nd:YAG laser

Henryk Fiedorowicz, Andrzej Bartnik, M. Szczurek et al. · Optics Communications · 1999 · 86 citations

X-ray Spectroscopy, Engineering, X-ray Diffraction +6

Novel Evaluation System for Extreme Ultraviolet Lithography Resist in NewSUBARU

Takeo Watanabe, Hiroo Kinoshita, Noriyuki Sakaya et al. · Japanese Journal of Applied Physics · 2005 · 42 citations

Engineering, Electron-beam Lithography, Ion Beam Instrumentation +19

Full characterization of a high-gain saturated x-ray laser at 13.9 nm

S. Sebban, Hiroyuki Daido, Noriyuki Sakaya et al. · Physical Review A · 2000 · 31 citations

X-ray Spectroscopy, Engineering, Laser-plasma Interaction +19

Mask defect inspection using an extreme ultraviolet microscope

Kazuhiro Hamamoto, Y. Tanaka, S. Y. Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 29 citations

Ultraviolet Light, Optical Materials, Engineering +18

Cleaning of extreme ultraviolet lithography optics and masks using 13.5nm and 172nm radiation

Kazuhiro Hamamoto, Y. Tanaka, Takeo Watanabe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 28 citations

Ultraviolet Light, Short Wavelength Optic, Optical Materials +21