Concepedia

Y. Tanaka

YT

Statistics

Publications

8

Citations

187

H-Index

8

Active since

1972

Affiliations

Osaka Research Institute of Industrial Science and Technology(Current)

The University of Osaka

Hoya (Japan)

University of Hyogo

Y. Tanaka is an author at Osaka Research Institute of Industrial Science and Technology specializing in materials science, natural sciences, and materials engineering.

Publications per year

1972–2005

8

Publications

8

The γ→ε→α′ Martensitic Transformations in an Fe–Mn–C Alloy

Ken rsquo ichi Shimizu, Y. Tanaka · Transactions of the Japan Institute of Metals · 1978 · 32 citations · Full text

, , +17

Mask defect inspection using an extreme ultraviolet microscope

Kazuhiro Hamamoto, Y. Tanaka, S. Y. Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 29 citations

, , +14

Cleaning of extreme ultraviolet lithography optics and masks using 13.5nm and 172nm radiation

Kazuhiro Hamamoto, Y. Tanaka, Takeo Watanabe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 28 citations

, , +13

Carbide Formation upon Tempering at Low Temperatures in Fe–Mn–C Alloys

Y. Tanaka, Ken rsquo ichi Shimizu · Transactions of the Japan Institute of Metals · 1981 · 26 citations · Full text

, , +17

Anomalous Changes in Austenite and Martensite Lattice Parameters of Fe–Mn–C Alloys

Y. Tanaka, Ken rsquo ichi Shimizu · Transactions of the Japan Institute of Metals · 1980 · 26 citations · Full text

, , +16

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