Concepedia

S. Y. Lee

SY

1

Publications

29

Citations

1

H-Index

2005

Active since

Affiliations

University of Hyogo(Current)

S. Y. Lee is an author at University of Hyogo specializing in applied physics, engineering, and optical components.

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Publications per year

2005–2005

1

Publications

1

Mask defect inspection using an extreme ultraviolet microscope

Kazuhiro Hamamoto, Y. Tanaka, S. Y. Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 29 citations

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