UV nanoimprint lithography process optimization for electron device manufacturing on nanosized scale

Step and flash imprint lithography: a new approach to high-resolution patterning

Matthew Colburn, Stephen C. Johnson, M. D. Stewart et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 564 citations

Engineering, Materials Engineering, Materials Science +16

Large scale ultraviolet-based nanoimprint lithography

B. Vratzov, Andreas Fuchs, Max C. Lemme et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 71 citations

Engineering, Electrical Engineering, Materials Science +14

Status and prospects of UV-Nanoimprint technology

Markus Bender, Andreas Fuchs, Ulrich Plachetka et al. · Microelectronic Engineering · 2006 · 62 citations

Engineering, Materials Engineering, Materials Science +12

UV nanoimprint materials: Surface energies, residual layers, and imprint quality

H. Schmitt, L. Frey, H. Ryssel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 49 citations · Full text

Engineering, Materials Engineering, Materials Science +15

Custom-specific UV nanoimprint templates and life-time of antisticking layers

H. Schmitt, M. Zeidler, Mathias Rommel et al. · Microelectronic Engineering · 2008 · 24 citations · Full text

Engineering, Materials Engineering, Materials Science +12