S. Petersen

Limitations of focused ion beam nanomachining

C. Lehrer, L. Frey, S. Petersen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 96 citations

Materials Science, Ion Implantation, Nanometer Structures +11

Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics

V. Yanev, Mathias Rommel, M. Lemberger et al. · Applied Physics Letters · 2008 · 85 citations · Full text

Engineering, Microscopy, Tuna Current Maps +19

Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques

Mathias Rommel, G. Spoldi, V. Yanev et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 38 citations · Full text

Engineering, Microscopy, Ion Beam Instrumentation +18

Defects and gallium-contamination during focused ion beam micro machining

C. Lehrer, L. Frey, S. Petersen et al. · 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) · 2000 · 21 citations

Materials Engineering, Electrical Engineering, Defect Generation +14

Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused ion beam nano machining

C. Lehrer, L. Frey, S. Petersen et al. · Microelectronic Engineering · 2001 · 20 citations

Engineering, Microfabrication, Nanotechnology +13