Concepedia

Local material removal by focused ion beam milling and etching

S. Lipp, L. Frey, Gerhard Franz, E. Demm, S. Petersen, H. Ryssel

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 15 citations · 6 references

DOI

Concepts

References

6

The focused ion beam as an integrated circuit restructuring tool

J. Melngailis, C. R. Musil, E.H. Stevens et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 82 citations

, , +11

Focused ion beam induced deposition of platinum for repair processes

Tao Tao, William Wilkinson, J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 72 citations

, , +7

Fabrication of Planar and Cross-Sectional TEM Specimens Using a Focused Ion Beam

Richard Young, Eugenie Kirk, David A. Williams et al. · MRS Proceedings · 1990 · 67 citations

, , +7

Digital scan model for focused ion beam induced gas etching

L. R. Harriott · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 31 citations

, , +15

Focused-ion-beam ‘‘cutter’’ and ‘‘attacher’’ for micromachining and device transplantation

T. Ishitani, Tsuyoshi Ohnishi, Y. Madokoro et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 30 citations

, , +14