A comparison of focused ion beam and electron beam induced deposition processes

S. Lipp, L. Frey, C. Lehrer, +3

Microelectronics Reliability

Ion ImplantationElectron BeamPhysicsDeposition ProcessesApplied Physics +3

Investigations on the topology of structures milled and etched by focused ion beams

S. Lipp, L. Frey, C. Lehrer, +3

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Topological PropertiesThin LamellasEngineeringElectron-beam LithographyMicroscopy +14

Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiO<i>x</i>) deposition

S. Lipp, L. Frey, C. Lehrer, +4

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringThin Film Process TechnologyChemistryChemical DepositionSilicon On Insulator +17

Fabrication of field emitter array using focused ion and electron beam induced reaction

M. Takai, T. Kishimoto, H. Morimoto, +7

Microelectronic Engineering

Electrical EngineeringEngineeringElectron-beam LithographyElectron BeamApplied Physics +2

Modification of field emitter array tip shape by focused ion-beam irradiation

M. Takai, T. Kishimoto, Masatsugu Yamashita, +7

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Materials ScienceFocused Ion-beam IrradiationElectrical EngineeringTip Shape InspectionsEngineering +10

Field emitter array fabricated using focused ion and electron beam induced reaction

O. Yavaş, C. Ochiai, M. Takai, +7

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Gate OpeningElectrical EngineeringIon ImplantationEngineeringElectron-beam Lithography +12

AFM and STM investigation of carbon nanotubes produced by high energy ion irradiation of graphite

László Péter Biró, Géza I. Márk, J. Gyulai, +5

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Materials ScienceGraphene NanomeshesChemical EngineeringEngineeringCarbon-based Material +5

Far-infrared Fabry–Perot resonator with high <i>T</i> <i>c</i> YBa2Cu3O7−δ films on silicon plates

E.V. Pechen, Stefan Vent, B. Brünner, +6

Applied Physics Letters

Thz PhotonicsOptical MaterialsTerahertz TechnologyEngineeringTerahertz Photonics +15

Local material removal by focused ion beam milling and etching

S. Lipp, L. Frey, Gerhard Franz, +3

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Materials ScienceLocal Material RemovalIon ImplantationEngineeringMaterial Processing +4