S. Lipp

A comparison of focused ion beam and electron beam induced deposition processes

S. Lipp, L. Frey, C. Lehrer et al. · Microelectronics Reliability · 1996 · 50 citations

Ion Implantation, Electron Beam, Physics +5

Investigations on the topology of structures milled and etched by focused ion beams

S. Lipp, L. Frey, C. Lehrer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 49 citations

Topological Properties, Thin Lamellas, Engineering +16

Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiO<i>x</i>) deposition

S. Lipp, L. Frey, C. Lehrer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 45 citations

Engineering, Thin Film Process Technology, Chemistry +19

Fabrication of field emitter array using focused ion and electron beam induced reaction

M. Takai, T. Kishimoto, H. Morimoto et al. · Microelectronic Engineering · 1998 · 30 citations

Electrical Engineering, Engineering, Electron-beam Lithography +4

Modification of field emitter array tip shape by focused ion-beam irradiation

M. Takai, T. Kishimoto, Masatsugu Yamashita et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 30 citations

Materials Science, Focused Ion-beam Irradiation, Electrical Engineering +12