Fabrication of field emitter array using focused ion and electron beam induced reaction - Concepedia

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Fabrication of field emitter array using focused ion and electron beam induced reaction

30

Citations

3

References

1998

Year

M. Takai, T. Kishimoto, H. Morimoto, Y. K. Park, S. Lipp, C. Lehrer, L. Frey, H. Ryssel, A. Hosono, S. Kawabuchi

Microelectronic Engineering

Electrical EngineeringEngineeringElectron-beam LithographyElectron BeamApplied PhysicsIon BeamField Emitter Array

References

	Year	Citations

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