C. Lehrer

Nanoscale effects in focused ion beam processing

L. Frey, C. Lehrer, H. Ryssel · Applied Physics A · 2003 · 166 citations

Engineering, Physics, Microscopy +6

Limitations of focused ion beam nanomachining

C. Lehrer, L. Frey, S. Petersen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 96 citations

Materials Science, Ion Implantation, Nanometer Structures +11

Influence of the cantilever holder on the vibrations of AFM cantilevers

U. Rabe, S. Hirsekorn, M. Reinstädtler et al. · Nanotechnology · 2006 · 50 citations

Resonance Amplification, Engineering, Microscopy +22

A comparison of focused ion beam and electron beam induced deposition processes

S. Lipp, L. Frey, C. Lehrer et al. · Microelectronics Reliability · 1996 · 50 citations

Ion Implantation, Electron Beam, Physics +5

UV nanoimprint materials: Surface energies, residual layers, and imprint quality

H. Schmitt, L. Frey, H. Ryssel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 49 citations · Full text

Materials Science, Imprint Quality, Engineering +15