Nanoscale effects in focused ion beam processing

L. Frey, C. Lehrer, H. Ryssel

Applied Physics A

EngineeringPhysicsMicroscopyNanotechnologyNanoscale Effects +4

Limitations of focused ion beam nanomachining

C. Lehrer, L. Frey, S. Petersen, +1

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Materials ScienceIon ImplantationNanometer StructuresEngineeringNanometer Range +9

Influence of the cantilever holder on the vibrations of AFM cantilevers

U. Rabe, S. Hirsekorn, M. Reinstädtler, +3

Nanotechnology

Resonance AmplificationEngineeringMicroscopyMechanical EngineeringCantilever Holder +20

A comparison of focused ion beam and electron beam induced deposition processes

S. Lipp, L. Frey, C. Lehrer, +3

Microelectronics Reliability

Ion ImplantationElectron BeamPhysicsDeposition ProcessesApplied Physics +3

UV nanoimprint materials: Surface energies, residual layers, and imprint quality

H. Schmitt, L. Frey, H. Ryssel, +2

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Materials ScienceImprint QualityEngineeringNanomaterialsNanotechnology +13

Investigations on the topology of structures milled and etched by focused ion beams

S. Lipp, L. Frey, C. Lehrer, +3

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Topological PropertiesThin LamellasEngineeringElectron-beam LithographyMicroscopy +14

Simulation of ion beam direct structuring for 3D nanoimprint template fabrication

Elmar Platzgummer, A. Biedermann, H. Langfischer, +8

Microelectronic Engineering

Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabrication +9

Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiO<i>x</i>) deposition

S. Lipp, L. Frey, C. Lehrer, +4

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringThin Film Process TechnologyChemistryChemical DepositionSilicon On Insulator +17

Fabrication of field emitter array using focused ion and electron beam induced reaction

M. Takai, T. Kishimoto, H. Morimoto, +7

Microelectronic Engineering

Electrical EngineeringEngineeringElectron-beam LithographyElectron BeamApplied Physics +2

Field emitter array fabricated using focused ion and electron beam induced reaction

O. Yavaş, C. Ochiai, M. Takai, +7

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Gate OpeningElectrical EngineeringIon ImplantationEngineeringElectron-beam Lithography +12