A comparison of focused ion beam and electron beam induced deposition processes

Catalytic growth rate enhancement of electron beam deposited iron films

Roderick R. Kunz, T. M. Mayer · Applied Physics Letters · 1987 · 61 citations

Natural Sciences, Materials Engineering, Materials Science +12

Three-dimensional structurization by additive lithography, analysis of deposits using TEM and EDX, and application to field-emitter tips

Johannes Kretz, M. Rudolph, M. Weber et al. · Microelectronic Engineering · 1994 · 38 citations

Engineering, Electrical Engineering, Materials Science +13

Local material removal by focused ion beam milling and etching

S. Lipp, L. Frey, Gerhard Franz et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 15 citations

Engineering, Materials Engineering, Materials Science +14