Concepedia
Statistics
Publications
3
Citations
112
H-Index
Active since
1996
Affiliations
Schott (Germany)(Current)
Fraunhofer Institute for Integrated Circuits
Siemens (Germany)
Friedrich-Alexander-Universität Erlangen-Nürnberg
S. Pauthner is an author at Schott (Germany) specializing in materials engineering, materials science, and natural sciences.
Publications per year
1996–2006
A comparison of focused ion beam and electron beam induced deposition processes
S. Lipp, L. Frey, C. Lehrer et al. · Microelectronics Reliability · 1996 · 50 citations
Natural Sciences, Materials Engineering, Materials Science +10
Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiO<i>x</i>) deposition
S. Lipp, L. Frey, C. Lehrer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 45 citations
Natural Sciences, Materials Engineering, Materials Science +14
Impact of back side circuit edit on active device performance in bulk silicon ICs
Christian Boit, U. Kerst, Rudolf Schlangen et al. · 2006 · 17 citations
Engineering, Computer Engineering, Electrical Engineering +12
1–3 of 3