Concepedia

H. Ryssel

HR

140

Publications

4.2K

Citations

36

H-Index

1972

Active since

Affiliations

Friedrich-Alexander-Universität Erlangen-Nürnberg(Current)

Schott (Germany)

Fraunhofer Institute for Integrated Circuits

Fraunhofer Institute for Integrated Systems and Device Technology

Fraunhofer-Gesellschaft

H. Ryssel is an author at Friedrich-Alexander-Universität Erlangen-Nürnberg specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceElectrical EngineeringMicroelectronicsPhysicsSurface ScienceMaterials EngineeringMicrofabricationNanotechnology

Publications per year

1972–2015

140

Publications

140

Nanoscale effects in focused ion beam processing

L. Frey, C. Lehrer, H. Ryssel · Applied Physics A · 2003 · 166 citations

Engineering, Physics, Microscopy +6

Determination of vacancy concentrations in the bulk of silicon wafers by platinum diffusion experiments

Mohan V. Jacob, P. Pichler, H. Ryssel et al. · Journal of Applied Physics · 1997 · 155 citations · Full text

Platinum Diffusion Experiments, Point Defects, Engineering +19

Gold and platinum diffusion: The key to the understanding of intrinsic point defect behavior in silicon

Horst Zimmermann, H. Ryssel · Applied Physics A · 1992 · 116 citations

Materials Science, Engineering, Physics +9

Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy

P. Petrík, László Péter Biró, M. Fried et al. · Thin Solid Films · 1998 · 98 citations

Materials Science, Atomic Force Microscopy, Surface Characterization +9

Limitations of focused ion beam nanomachining

C. Lehrer, L. Frey, S. Petersen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 96 citations

Materials Science, Ion Implantation, Nanometer Structures +11

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