V. Yanev

Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics

V. Yanev, Mathias Rommel, M. Lemberger et al. · Applied Physics Letters · 2008 · 85 citations · Full text

Engineering, Microscopy, Tuna Current Maps +19

Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques

Mathias Rommel, G. Spoldi, V. Yanev et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 38 citations · Full text

Engineering, Microscopy, Ion Beam Instrumentation +18

Investigations of MBE grown InN and the influence of sputtering on the surface composition

Stefan Krischok, V. Yanev, O. Balykov et al. · Surface Science · 2004 · 30 citations

Materials Science, Materials Engineering, Surface Composition +9

Influence of the RF power on the deposition rate and the chemical surface composition of fluorocarbon films prepared in dry etching gas plasma

V. Yanev, Stefan Krischok, Andreas Opitz et al. · Surface Science · 2004 · 28 citations

Materials Science, Engineering, Surface Science +8

Improved insight in charge trapping of high-k ZrO2/SiO2 stacks by use of tunneling atomic force microscopy

A. Paskaleva, V. Yanev, Mathias Rommel et al. · Journal of Applied Physics · 2008 · 26 citations

Atomic Force Microscopy, Engineering, Tunneling Microscopy +16