Susanne Beuer

Statistics

Publications

Citations

116

H-Index

Active since

2007

Affiliations

Fraunhofer Institute for Integrated Systems and Device Technology(Current)

Schott (Germany)

Friedrich-Alexander-Universität Erlangen-Nürnberg

Susanne Beuer is an author at Fraunhofer Institute for Integrated Systems and Device Technology specializing in materials science, ion implantation, and engineering.

ORCID

Publications per year

2007–2023

Publications

Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques

Mathias Rommel, G. Spoldi, V. Yanev et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 38 citations · Full text

Natural Sciences, Materials Science, Physics +15

Experimental observation of FIB induced lateral damage on silicon samples

G. Spoldi, Susanne Beuer, Mathias Rommel et al. · Microelectronic Engineering · 2009 · 24 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Accurate parameter extraction for the simulation of direct structuring by ion beams

Susanne Beuer, Mathias Rommel, C. Lehrer et al. · Microelectronic Engineering · 2007 · 12 citations · Full text

Natural Sciences, Materials Science, Physics +8

UV nanoimprint lithography process optimization for electron device manufacturing on nanosized scale

H. Schmitt, B. Amon, Susanne Beuer et al. · Microelectronic Engineering · 2008 · 11 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +12

Intragranular thermal fatigue of Cu thin films: Near-grain boundary hardening, strain localization and voiding

K. Hlushko, T. Ziegelwanger, Michael Reisinger et al. · Acta Materialia · 2023 · 11 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

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