Experimental observation of FIB induced lateral damage on silicon samples - Concepedia

Concepedia

Publication | Open Access

Experimental observation of FIB induced lateral damage on silicon samples

DOI Full Paper Access

24

Citations

8

References

2009

Year

G. Spoldi, Susanne Beuer, Mathias Rommel, V. Yanev, Anton J. Bauer, H. Ryssel

Microelectronic Engineering

Damage MechanismExperimental ObservationEngineeringPhysicsApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsSilicon Debugging

References

	Year	Citations

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