Anton J. Bauer

Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics

V. Yanev, Mathias Rommel, M. Lemberger et al. · Applied Physics Letters · 2008 · 85 citations · Full text

Engineering, Microscopy, Tuna Current Maps +19

Comprehensive Study of the Electron Scattering Mechanisms in 4H-SiC MOSFETs

Viktoryia Uhnevionak, A. Burenkov, Christian Strenger et al. · IEEE Transactions on Electron Devices · 2015 · 84 citations · Full text

Device Modeling, Semiconductor Technology, Electrical Engineering +14

Different current conduction mechanisms through thin high-<i>k</i> HfxTiySizO films due to the varying Hf to Ti ratio

A. Paskaleva, Anton J. Bauer, M. Lemberger et al. · Journal of Applied Physics · 2004 · 73 citations

Materials Science, Electrical Engineering, Electronic Devices +15

Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications

Werner Daves, N. Behnel, Volker Häublein et al. · Thin Solid Films · 2011 · 71 citations

Materials Engineering, Materials Science, Harsh Environment Applications +9

Detailed leakage current analysis of metal–insulator–metal capacitors with ZrO2, ZrO2/SiO2/ZrO2, and ZrO2/Al2O3/ZrO2 as dielectric and TiN electrodes

Wenke Weinreich, Shariq Ahmed, Konrad Seidel et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2012 · 68 citations

Materials Science, Oxide Heterostructures, Electrical Engineering +15