Fabrication of nanostructures using a UV-based imprint technique

Markus Bender, Martin Otto, B. Hadam, +3

Microelectronic Engineering

Materials ScienceEngineeringNanomaterialsMicrofabricationNanotechnology +4

High resolution lithography with PDMS molds

Markus Bender, Ulrich Plachetka, Jianhua Ran, +5

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Imprint PressureEngineeringMechanical EngineeringSoft MatterFlexible Sensor +15

High-frequency acoustic charge transport in GaAs nanowires

Serkan Büyükköse, A. Hernández‐Mínguez, B. Vratzov, +5

Nanotechnology

SemiconductorsElectrical EngineeringEngineeringRf SemiconductorPhysics +12

Large scale ultraviolet-based nanoimprint lithography

B. Vratzov, Andreas Fuchs, Max C. Lemme, +2

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringElectron-beam LithographyBeam LithographyNanoelectronicsPrinted Electronics +15

Ultrahigh-frequency surface acoustic wave transducers on ZnO/SiO₂/Si using nanoimprint lithography

Serkan Büyükköse, B. Vratzov, Derya Ataç, +3

Nanotechnology

Nanostructured Polymer Brushes by UV‐Assisted Imprint Lithography and Surface‐Initiated Polymerization for Biological Functions

Edmondo M. Benetti, Canet Acikgöz, Xiaofeng Sui, +4

Advanced Functional Materials

Ethylene GlycolEngineeringPolymer NanotechnologyResponsive PolymersNanostructured Polymer +18

Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range

S.J. Goh, Hubertus M.J. Bastiaens, B. Vratzov, +3

Optics Express

Ultrahigh-frequency surface acoustic wave generation for acoustic charge transport in silicon

Serkan Büyükköse, B. Vratzov, J. van Veen, +2

Applied Physics Letters

EngineeringAcoustic MetamaterialSilicon On InsulatorPiezo-electrical GenerationPhysical Acoustic +18

Interferometric <i>in situ</i> alignment for UV-based nanoimprint

Andreas Fuchs, B. Vratzov, T. Wahlbrink, +2

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabrication +13

Flexible thin-film transistors using multistep UV nanoimprint lithography

Pieter F. Moonen, B. Vratzov, Wiljan T. T. Smaal, +4

Organic Electronics

Flexible Thin-film TransistorsElectrical EngineeringEngineeringBeam LithographyFlexible Electronics +8