Concepedia

Ulrich Plachetka

UP

24

Publications

988

Citations

16

H-Index

2004

Active since

Affiliations

AMO (Germany)(Current)

RWTH Aachen University

EV Group (Austria)

Ulrich Plachetka is an author at AMO (Germany) specializing in engineering, microfabrication, and materials science.

Top concepts

EngineeringMaterial ScienceMicrofabricationApplied Physics3D PrintingNanofabricationNanomaterialsNanotechnologyNanolithographyFlexible Electronics

Publications per year

2004–2024

24

Publications

24

UV enhanced substrate conformal imprint lithography (UV-SCIL) technique for photonic crystals patterning in LED manufacturing

Ran Ji, Michael Hornung, Marc A. Verschuuren et al. · Microelectronic Engineering · 2009 · 144 citations

Materials Science, Photonics, Photonic Sensor +11

Wafer scale patterning by soft UV-Nanoimprint Lithography

Ulrich Plachetka · Microelectronic Engineering · 2004 · 131 citations

Materials Science, Wafer Scale Processing, Engineering +9

Improved mold fabrication for the definition of high quality nanopatterns by Soft UV-Nanoimprint lithography using diluted PDMS material

Namil Koo, Markus Bender, Ulrich Plachetka et al. · Microelectronic Engineering · 2007 · 102 citations

Materials Science, Engineering, Beam Lithography +15

High resolution lithography with PDMS molds

Markus Bender, Ulrich Plachetka, Jianhua Ran et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 96 citations

Imprint Pressure, Engineering, Mechanical Engineering +17

Wafer scale patterning by soft UV-Nanoimprint Lithography

Ulrich Plachetka · Microelectronic Engineering · 2004 · 82 citations

Materials Science, Wafer Scale Processing, Engineering +9

Rows per page

1–5 of 24