UV enhanced substrate conformal imprint lithography (UV-SCIL) technique for photonic crystals patterning in LED manufacturing

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Complete photonic bandgaps in 12-fold symmetric quasicrystals

M.E. Zoorob, Martin D. B. Charlton, Geoff J.M. Parker et al. · Nature · 2000 · 531 citations

Natural Sciences, Materials Science, Physics +14

Improving stamps for 10 nm level wafer scale nanoimprint lithography

M. Beck, Mariusz Graczyk, Ivan Maximov et al. · Microelectronic Engineering · 2002 · 268 citations

Engineering, Materials Engineering, Materials Science +14

Fabrication of nanostructures using a UV-based imprint technique

Markus Bender, Martin Otto, B. Hadam et al. · Microelectronic Engineering · 2000 · 123 citations

Engineering, Materials Engineering, Materials Science +11

High resolution lithography with PDMS molds

Markus Bender, Ulrich Plachetka, Jianhua Ran et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 97 citations

Engineering, Manufacturing Engineering, Materials Science +17