Concepedia

Publication | Closed Access

UV enhanced substrate conformal imprint lithography (UV-SCIL) technique for photonic crystals patterning in LED manufacturing

DOI

144

Citations

8

References

2009

Year

Ran Ji, Michael Hornung, Marc A. Verschuuren, Robert van de Laar, Jan van Eekelen, Ulrich Plachetka, Michael Moeller, Christian Moormann
Microelectronic Engineering

References

YearCitations

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