Statistics
Publications
14
Citations
620
H-Index
12
Active since
2006
Michael Hornung is an author at SUSS MicroTec (Germany) specializing in engineering, mask fabrication, and microfabrication.
Publications per year
2006–2013
14
14
Michael Hornung, M. Ludwig, A.M. Gerrard et al. · Engineering in Life Sciences · 2006 · 94 citations · Full text
Advanced mask aligner lithography: new illumination system
Reinhard Voelkel, Uwe Vogler, A. Bich et al. · Optics Express · 2010 · 92 citations · Full text
Natural Sciences, Manufacturing Engineering, Microfabrication +12
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