Statistics
Publications
13
Citations
600
H-Index
12
Active since
2006
Michael Hornung is an author at SUSS MicroTec (Germany) specializing in engineering, microfabrication, and applied physics.
Publications per year
2006–2013
13
13
Michael Hornung, M. Ludwig, A.M. Gerrard et al. · Engineering in Life Sciences · 2006 · 92 citations · Full text
Advanced mask aligner lithography: new illumination system
Reinhard Voelkel, Uwe Vogler, A. Bich et al. · Optics Express · 2010 · 90 citations · Full text
Proximity Lithography, Engineering, New Illumination System +11
Michael Hornung, M. Ludwig, H.‐P. Schmauder · Engineering in Life Sciences · 2006 · 76 citations
Engineering, Biological Waste Treatment, Bioelectrochemical Reactor +16
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