7
Publications
233
Citations
7
H-Index
2005
Active since
A. Bich is an author at Suss Microoptics (Switzerland) specializing in engineering, microfabrication, and optical properties.
Top concepts
EngineeringMicrofabricationPhotonicsOptical SystemsOptical PropertiesOphthalmologyApplied PhysicsOptoelectronicsOptical Materials3D Printing
Publications per year
2005–2010
7
7
Advanced mask aligner lithography: new illumination system
Reinhard Voelkel, Uwe Vogler, A. Bich et al. · Optics Express · 2010 · 90 citations · Full text
Proximity Lithography, Engineering, New Illumination System +11
Contact and proximity lithography using 193nm Excimer laser in Mask Aligner
Stefan Partel, S. Zoppel, P. Hudek et al. · Microelectronic Engineering · 2009 · 17 citations
Rows per page
1–5 of 7