Concepedia

Reinhard Voelkel

RV

23

Publications

906

Citations

16

H-Index

1996

Active since

Affiliations

Suss Microoptics (Switzerland)(Current)

École Polytechnique Fédérale de Lausanne

SUSS MicroTec (Germany)

Fraunhofer Institute for Applied Optics and Precision Engineering

University of Neuchâtel

Reinhard Voelkel is an author at Suss Microoptics (Switzerland) specializing in engineering, microfabrication, and applied physics.

Top concepts

EngineeringMicrofabricationApplied PhysicsPhotonicsOptical PropertiesOptoelectronicsOphthalmologyOptical SystemsOptical Materials3D Printing

Publications per year

1996–2020

23

Publications

23

Laser beam homogenizing: limitations and constraints

Reinhard Voelkel, K. J. Weible · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 111 citations

Photonics, Engineering, Laser Science +12

Advanced mask aligner lithography: new illumination system

Reinhard Voelkel, Uwe Vogler, A. Bich et al. · Optics Express · 2010 · 90 citations · Full text

Proximity Lithography, Engineering, New Illumination System +11

Microlens laser beam homogenizer: from theory to application

Maik Zimmermann, Norbert Lindlein, Reinhard Voelkel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 90 citations

Photonics, Engineering, Physics +15

Microlens array imaging system for photolithography

Reinhard Voelkel · Optical Engineering · 1996 · 77 citations · Full text

Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect

Lorenz Stuerzebecher, Torsten Harzendorf, Uwe Vogler et al. · Optics Express · 2010 · 77 citations · Full text

Diffraction Pattern, Pinhole Array Mask, Engineering +15

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