Statistics
Publications
24
Citations
866
H-Index
16
Active since
2004
Reinhard Voelkel is an author at Suss Microoptics (Switzerland) specializing in optics, microfabrication, and engineering.
Publications per year
2004–2020
24
24
Advanced mask aligner lithography: new illumination system
Reinhard Voelkel, Uwe Vogler, A. Bich et al. · Optics Express · 2010 · 92 citations · Full text
Natural Sciences, Manufacturing Engineering, Microfabrication +12
Wafer-scale micro-optics fabrication
Reinhard Voelkel · Advanced Optical Technologies · 2012 · 74 citations
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