Torsten Harzendorf

Publications

375

Citations

H-Index

2010

Active since

Affiliations

Fraunhofer Institute for Applied Optics and Precision Engineering(Current)

Suss Microoptics (Switzerland)

Friedrich Schiller University Jena

Fraunhofer-Gesellschaft

Torsten Harzendorf is an author at Fraunhofer Institute for Applied Optics and Precision Engineering specializing in engineering, applied physics, and optoelectronics.

Top concepts

EngineeringApplied PhysicsMicroscopyOptoelectronicsMicrofabricationPhotonics3D PrintingOptical SystemsMaterial ScienceGratings

Publications per year

2010–2019

Publications

High performance diffraction gratings made by e-beam lithography

Uwe D. Zeitner, Maria Oliva, F. Fuchs et al. · Applied Physics A · 2012 · 100 citations

Materials Science, Photonics, Optical Materials +10

Advanced mask aligner lithography: new illumination system

Reinhard Voelkel, Uwe Vogler, A. Bich et al. · Optics Express · 2010 · 90 citations · Full text

Proximity Lithography, Engineering, New Illumination System +11

Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect

Lorenz Stuerzebecher, Torsten Harzendorf, Uwe Vogler et al. · Optics Express · 2010 · 77 citations · Full text

Diffraction Pattern, Pinhole Array Mask, Engineering +15

Miniature integrated micro-spectrometer array for snap shot multispectral sensing

Norbert Danz, Bernd Höfer, Erik Förster et al. · Optics Express · 2019 · 31 citations · Full text

Photonic Sensor, Microscopy, Parallel Spectral Sensing +10

Multilevel blazed gratings in resonance domain: an alternative to the classical fabrication approach

Maria Oliva, Torsten Harzendorf, Dirk Michaelis et al. · Optics Express · 2011 · 21 citations · Full text

Transient Grating, Optical Materials, Classical Fabrication Approach +17

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