Concepedia

Uwe Vogler

UV

7

Publications

272

Citations

7

H-Index

2009

Active since

Affiliations

Suss Microoptics (Switzerland)(Current)

Fraunhofer Institute for Applied Optics and Precision Engineering

SUSS MicroTec (Germany)

Uwe Vogler is an author at Suss Microoptics (Switzerland) specializing in microfabrication, engineering, and optoelectronics.

Top concepts

EngineeringMicrofabricationOptoelectronicsApplied PhysicsPhotonicsMicroscopy3D PrintingOphthalmologyMicroelectronicsOptical Properties

Publications per year

2009–2014

7

Publications

7

Advanced mask aligner lithography: new illumination system

Reinhard Voelkel, Uwe Vogler, A. Bich et al. · Optics Express · 2010 · 90 citations · Full text

Proximity Lithography, Engineering, New Illumination System +11

Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect

Lorenz Stuerzebecher, Torsten Harzendorf, Uwe Vogler et al. · Optics Express · 2010 · 77 citations · Full text

Diffraction Pattern, Pinhole Array Mask, Engineering +15

Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks

Tina Weichelt, Uwe Vogler, Lorenz Stuerzebecher et al. · Optics Express · 2014 · 38 citations · Full text

Engineering, Electron-beam Lithography, Microscopy +16

Half-tone proximity lithography

Torsten Harzendorf, Lorenz Stuerzebecher, Uwe Vogler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 21 citations

Engineering, Electron-beam Lithography, Microscopy +16

Contact and proximity lithography using 193nm Excimer laser in Mask Aligner

Stefan Partel, S. Zoppel, P. Hudek et al. · Microelectronic Engineering · 2009 · 17 citations

Proximity Lithography, Photonics, Mask Aligner +12

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