Lorenz Stuerzebecher

Publications

290

Citations

H-Index

2010

Active since

Affiliations

Fraunhofer Institute for Applied Optics and Precision Engineering(Current)

Suss Microoptics (Switzerland)

Friedrich Schiller University Jena

SUSS MicroTec (Germany)

Fraunhofer-Gesellschaft

Lorenz Stuerzebecher is an author at Fraunhofer Institute for Applied Optics and Precision Engineering specializing in engineering, microfabrication, and optoelectronics.

Top concepts

EngineeringMicrofabricationOptoelectronicsApplied PhysicsMicroscopyPhotonics3D PrintingOphthalmologyNanolithographyOptical Systems

Publications per year

2010–2014

Publications

Advanced mask aligner lithography: new illumination system

Reinhard Voelkel, Uwe Vogler, A. Bich et al. · Optics Express · 2010 · 90 citations · Full text

Proximity Lithography, Engineering, New Illumination System +11

Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect

Lorenz Stuerzebecher, Torsten Harzendorf, Uwe Vogler et al. · Optics Express · 2010 · 77 citations · Full text

Diffraction Pattern, Pinhole Array Mask, Engineering +15

Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks

Tina Weichelt, Uwe Vogler, Lorenz Stuerzebecher et al. · Optics Express · 2014 · 38 citations · Full text

Engineering, Electron-beam Lithography, Microscopy +16

High-resolution proximity lithography for nano-optical components

Lorenz Stuerzebecher, F. Fuchs, Uwe D. Zeitner et al. · Microelectronic Engineering · 2014 · 34 citations

Optical Materials, Engineering, Electron-beam Lithography +9

Half-tone proximity lithography

Torsten Harzendorf, Lorenz Stuerzebecher, Uwe Vogler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 21 citations

Engineering, Electron-beam Lithography, Microscopy +16

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