Concepedia

Tina Weichelt

TW

3

Publications

66

Citations

3

H-Index

2012

Active since

Affiliations

Suss Microoptics (Switzerland)(Current)

Friedrich Schiller University Jena

Tina Weichelt is an author at Suss Microoptics (Switzerland) specializing in engineering, microfabrication, and optoelectronics.

Top concepts

Publications per year

2012–2017

3

Publications

3

Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks

Tina Weichelt, Uwe Vogler, Lorenz Stuerzebecher et al. · Optics Express · 2014 · 38 citations · Full text

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Advanced mask aligner lithography (AMALITH)

Reinhard Voelkel, Uwe Vogler, Arianna Bramati et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 16 citations

, , +12

Mask aligner lithography using laser illumination for versatile pattern generation

Tina Weichelt, Yannick Bourgin, Uwe D. Zeitner · Optics Express · 2017 · 12 citations · Full text

, , +11

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