141
Publications
2.5K
Citations
14
Authors
Garching bei München
Germany
SUSS MicroTec (Germany) is a company institution in Garching bei München, Germany known for engineering, applied physics, and microfabrication.
141
Andrej Rumiantsev, Nick Ridler · IEEE Microwave Magazine · 2008 · 172 citations
Sensor Calibration, Vector Network Analysers, Engineering +15
Advanced mask aligner lithography: new illumination system
Reinhard Voelkel, Uwe Vogler, A. Bich et al. · Optics Express · 2010 · 90 citations · Full text
Proximity Lithography, Engineering, New Illumination System +11
Ordered arrays of nanoporous gold nanoparticles
Dong Wang, Ran Ji, Arne Albrecht et al. · Beilstein Journal of Nanotechnology · 2012 · 61 citations · Full text
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| Publications | Citations | H-Index | |
|---|---|---|---|
MH SUSS MicroTec (Germany) | 28 | 1.1K | 13 |
RV SUSS MicroTec (Germany) | 12 | 229 | 6 |
SS SUSS MicroTec (Germany) | 31 | 101 | 6 |
MG SUSS MicroTec (Germany) | 23 | 87 | 6 |
SL SUSS MicroTec (Germany) | 10 | 73 | 4 |
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