Publication | Closed Access
Improving stamps for 10 nm level wafer scale nanoimprint lithography
268
Citations
4
References
2002
Year
Materials ScienceElectrical EngineeringWafer Scale ProcessingEngineeringElectron-beam LithographyBeam LithographyMicrofabricationNanotechnologyApplied PhysicsPrinted ElectronicsNanolithographyNanofabricationMicroelectronicsScale Nanoimprint Lithography3D PrintingNanolithography Method
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