E.-L. Sarwe

Improving stamps for 10 nm level wafer scale nanoimprint lithography

M. Beck, Mariusz Graczyk, Ivan Maximov et al. · Microelectronic Engineering · 2002 · 268 citations

Engineering, Materials Engineering, Materials Science +14

Nanoimprint- and UV-lithography: Mix&Match process for fabrication of interdigitated nanobiosensors

Lars Montelius, Babak Heidari, Mariusz Graczyk et al. · Microelectronic Engineering · 2000 · 58 citations

Engineering, Materials Engineering, Materials Science +14

Fabrication of Si-based nanoimprint stamps with sub-20 nm features

Ivan Maximov, E.-L. Sarwe, M. Beck et al. · Microelectronic Engineering · 2002 · 54 citations

Engineering, Materials Engineering, Materials Science +13

Lift-off process for nanoimprint lithography

Patrick Carlberg, Mariusz Graczyk, E.-L. Sarwe et al. · Microelectronic Engineering · 2003 · 49 citations

Engineering, Materials Engineering, Materials Science +14

Fabrication and mechanical characterization of ultrashort nanocantilevers

S. G. Nilsson, E.-L. Sarwe, Lars Montelius · Applied Physics Letters · 2003 · 44 citations

Engineering, Materials Science, Mechanical Engineering +17