Publication | Closed Access
Fabrication of Si-based nanoimprint stamps with sub-20 nm features
54
Citations
6
References
2002
Year
Materials ScienceSi-based Nanoimprint StampsEngineeringBeam LithographyMicrofabricationNanotechnologyApplied PhysicsPrinted ElectronicsNanolithographyNanofabricationElectronic PackagingMicroelectronicsNanolithography Method
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