Concepedia

M. Beck

MB

11

Publications

547

Citations

11

H-Index

2002

Active since

Affiliations

Lund University(Current)

Obducat (Sweden)

University of Wuppertal

Micro Resist Technology (Germany)

M. Beck is an author at Lund University specializing in engineering, nanofabrication, and microfabrication.

Top concepts

EngineeringNanofabricationMicrofabricationNanolithographyMaterial Science3D PrintingNanotechnologyApplied PhysicsChemical EngineeringSurface Science

Publications per year

2002–2019

11

Publications

11

Improving stamps for 10 nm level wafer scale nanoimprint lithography

M. Beck, Mariusz Graczyk, Ivan Maximov et al. · Microelectronic Engineering · 2002 · 268 citations

Materials Science, Electrical Engineering, Wafer Scale Processing +13

Fabrication of Si-based nanoimprint stamps with sub-20 nm features

Ivan Maximov, E.-L. Sarwe, M. Beck et al. · Microelectronic Engineering · 2002 · 54 citations

Materials Science, Si-based Nanoimprint Stamps, Engineering +10

Lift-off process for nanoimprint lithography

Patrick Carlberg, Mariusz Graczyk, E.-L. Sarwe et al. · Microelectronic Engineering · 2003 · 49 citations

Engineering, Beam Lithography, Microfabrication +9

Polymer stamps for nanoimprinting

K. Pfeiffer, Mathias Fink, Gisela Ahrens et al. · Microelectronic Engineering · 2002 · 40 citations

Materials Science, Engineering, Polymer Science +7

Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

M. Beck · Microelectronic Engineering · 2004 · 33 citations

Chemical Engineering, Engineering, Nanoimprint Lithography +13

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