Statistics
Publications
52
Citations
2K
Authors
11
Location
Lund, Sweden
52
Improving stamps for 10 nm level wafer scale nanoimprint lithography
M. Beck, Mariusz Graczyk, Ivan Maximov et al. · Microelectronic Engineering · 2002 · 268 citations
Nanoimprint lithography: an alternative nanofabrication approach
S. Zankovych, J. Seekamp, A. Kam et al. · Materials Science and Engineering C · 2003 · 177 citations
1–5 of 52
11
12
h-index
4
h-index
3
h-index
3
h-index
3
h-index
1–5 of 11