Mariusz Graczyk

Improving stamps for 10 nm level wafer scale nanoimprint lithography

M. Beck, Mariusz Graczyk, Ivan Maximov et al. · Microelectronic Engineering · 2002 · 268 citations

Materials Science, Electrical Engineering, Wafer Scale Processing +13

Strategies to obtain pattern fidelity in nanowire growth from large-area surfaces patterned using nanoimprint lithography

Gaute Otnes, Magnus Heurlin, Mariusz Graczyk et al. · Nano Research · 2016 · 67 citations · Full text

Nanoimprint- and UV-lithography: Mix&Match process for fabrication of interdigitated nanobiosensors

Lars Montelius, Babak Heidari, Mariusz Graczyk et al. · Microelectronic Engineering · 2000 · 58 citations

Engineering, Nanoengineering, Biosensing Systems +14

Fabrication of Si-based nanoimprint stamps with sub-20 nm features

Ivan Maximov, E.-L. Sarwe, M. Beck et al. · Microelectronic Engineering · 2002 · 54 citations

Materials Science, Si-based Nanoimprint Stamps, Engineering +10

Lift-off process for nanoimprint lithography

Patrick Carlberg, Mariusz Graczyk, E.-L. Sarwe et al. · Microelectronic Engineering · 2003 · 49 citations

Engineering, Beam Lithography, Microfabrication +9