Improving stamps for 10 nm level wafer scale nanoimprint lithography

M. Beck, Mariusz Graczyk, Ivan Maximov, +4

Microelectronic Engineering

Materials ScienceElectrical EngineeringWafer Scale ProcessingEngineeringElectron-beam Lithography +11

Strategies to obtain pattern fidelity in nanowire growth from large-area surfaces patterned using nanoimprint lithography

Gaute Otnes, Magnus Heurlin, Mariusz Graczyk, +5

Nano Research

Nanoimprint- and UV-lithography: Mix&Match process for fabrication of interdigitated nanobiosensors

Lars Montelius, Babak Heidari, Mariusz Graczyk, +3

Microelectronic Engineering

EngineeringNanoengineeringBiosensing SystemsMicrofabricationNanotechnology +12

Fabrication of Si-based nanoimprint stamps with sub-20 nm features

Ivan Maximov, E.-L. Sarwe, M. Beck, +4

Microelectronic Engineering

Materials ScienceSi-based Nanoimprint StampsEngineeringBeam LithographyMicrofabrication +8

Lift-off process for nanoimprint lithography

Patrick Carlberg, Mariusz Graczyk, E.-L. Sarwe, +3

Microelectronic Engineering

EngineeringBeam LithographyMicrofabricationNanotechnologyNanomanufacturing +7

Polymer stamps for nanoimprinting

K. Pfeiffer, Mathias Fink, Gisela Ahrens, +11

Microelectronic Engineering

Materials ScienceEngineeringPolymer SciencePrinted ElectronicsNanostructured Polymer +5

Transparent and flexible, nanostructured and mediatorless glucose/oxygen enzymatic fuel cells

Dmitry Pankratov, Richard Sundberg, Javier Sotres, +6

Journal of Power Sources

Chemical EngineeringEngineeringFlexible ElectronicsNanomaterialsProton-exchange Membrane +4

Study of photocurrent generation in InP nanowire-based p+-i-n+ photodetectors

Vishal Jain, Ali Nowzari, Jesper Wallentin, +8

Nano Research

III–V Nanowire Synthesis by Use of Electrodeposited Gold Particles

Reza Jafari Jam, Magnus Heurlin, Vishal Jain, +6

Nano Letters

EngineeringMetal NanoparticlesMetallic NanomaterialsIii–v Nanowire SynthesisSemiconductor Nanostructures +14

Development and characterization of silane antisticking layers on nickel-based stamps designed for nanoimprint lithography

M. Keil, M. Beck, Torbjörn G.I. Ling, +3

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringSurface NanotechnologySurface TechnologyChemical EngineeringSilane Film +22