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Nanoimprint- and UV-lithography: Mix&Match process for fabrication of interdigitated nanobiosensors

DOI

58

Citations

3

References

2000

Year

Lars Montelius, Babak Heidari, Mariusz Graczyk, Ivan Maximov, E.-L. Sarwe, Torbjörn G.I. Ling
Microelectronic Engineering

References

YearCitations

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