Eva-Lena Sarwe - Concepedia

Author

Eva-Lena Sarwe

Also Known As

Eva-Lena Sarwe

Publications

128

Citations

H-Index

Concepts

All Affiliations

Eva-Lena Sarwe is an author at Lund University specializing in applied physics, materials science, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	103
2	Applied Physics	3	3	103
3	Biomedical Engineering	1	1	81
4	Electrical Engineering	1	1	11
5	Materials Engineering	1	1	11

Eva-Lena Sarwe

Publications

103

Citations

H-Index

Page 1

	Year	Citations
Large scale nanolithography using nanoimprint lithography Babak Heidari, Ivan Maximov, Eva-Lena Sarwe, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringElectron-beam LithographyIntegrated CircuitsBiomedical EngineeringBeam Lithography	1999	81
High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si Yanwen Zhang, Thomas Winzell, Tonghe Zhang, Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Materials ScienceMaterials EngineeringHigh-fluence Co ImplantationIon ImplantationEngineering	1999	11
<title>Large-area nanoimprint fabrication of sub-100-nm interdigitated metal arrays</title> Lars Montelius, Babak Heidari, Mariusz Graczyk, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyNanodevicesPattern TransferNanoengineering	2000	11

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