Eva-Lena Sarwe

Large scale nanolithography using nanoimprint lithography

Babak Heidari, Ivan Maximov, Eva-Lena Sarwe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 81 citations

Engineering, Manufacturing Engineering, Materials Science +13

High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si

Yanwen Zhang, Thomas Winzell, Tonghe Zhang et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 11 citations

Engineering, Materials Engineering, Materials Science +9

<title>Large-area nanoimprint fabrication of sub-100-nm interdigitated metal arrays</title>

Lars Montelius, Babak Heidari, Mariusz Graczyk et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 11 citations

Engineering, Electrical Engineering, Materials Science +14