Concepedia

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High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si

DOI

11

Citations

17

References

1999

Year

Yanwen Zhang, Thomas Winzell, Tonghe Zhang, Margaretha Andersson, Ivan Maximov, Eva-Lena Sarwe, Mariusz Graczyk, Lars Montelius, Harry J. Whitlow
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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