Concepedia

Babak Heidari

BH

Statistics

Publications

14

Citations

876

H-Index

12

Active since

1999

Affiliations

Lund University(Current)

Obducat (Sweden)

VTT Technical Research Centre of Finland

University of Wuppertal

Micro Resist Technology (Germany)

Babak Heidari is an author at Lund University specializing in materials engineering, materials science, and nanoimprint lithography.

Publications per year

1999–2022

14

Publications

14

Nanoimprint lithography: an alternative nanofabrication approach

S. Zankovych, J. Seekamp, A. Kam et al. · Materials Science and Engineering C · 2003 · 177 citations

Engineering, Materials Engineering, Materials Science +14

Position-Controlled Uniform GaAs Nanowires on Silicon using Nanoimprint Lithography

A. Mazid Munshi, D L Dheeraj, Vidar Tonaas Fauske et al. · Nano Letters · 2014 · 139 citations

Engineering, Materials Engineering, Materials Science +17

Nanoimprint lithography at the 6 in. wafer scale

Babak Heidari, Ivan Maximov, Lars Montelius · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 125 citations

Engineering, Materials Engineering, Materials Science +14

Large scale nanolithography using nanoimprint lithography

Babak Heidari, Ivan Maximov, Eva-Lena Sarwe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 81 citations

Engineering, Manufacturing Engineering, Materials Science +13

New polymer materials for nanoimprinting

H. Schulz, Hella‐Christin Scheer, Thomas Hoffmann et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 68 citations

Natural Sciences, Materials Engineering, Materials Science +16

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