Concepedia

Publication | Closed Access

Polymer stamps for nanoimprinting

DOI

40

Citations

3

References

2002

Year

K. Pfeiffer, Mathias Fink, Gisela Ahrens, G. Gruetzner, F. Reuther, J. Seekamp, S. Zankovych, Ivan Maximov, M. Beck, Mariusz Graczyk,
Microelectronic Engineering

References

YearCitations

Page 1