Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 97 citations · 9 references
EngineeringManufacturing EngineeringMaterials ScienceMicrofabricationNanomaterialsNanotechnology3D PrintingMicrofabrication MaterialsNanoimprint LithographyNanomechanicsNanoscale MaterialsSoft LithographyDimensional StabilityImprint LithographyMold FabricationMoldsSoft Lithographic Device FabricationSoft Nanoimprint LithographyThree-dimensional NanostructuringUv Nanoimprint Lithography
The resolution, dimension stability, and reproducibility of the Soft UV-Nanoimprint is investigated. The potential for imprinting nanostructures with flexible molds in UV-curable resists in the 100nm regime are explored and the limitations analyzed. The dimensional stability of imprinted patterns is determined by the deformation of the mold that in term depends on the geometry of the structures and the imprint pressure applied.
9
Younan Xia, George M. Whitesides · Annual Review of Materials Science · 1998 · 4.6K citations
Contact-Inking Stamps for Microcontact Printing of Alkanethiols on Gold
L. Libioulle, Alexander Bietsch, Heinz Schmid et al. · Langmuir · 1998 · 174 citations