Concepedia

M.J. Verheijen

MV

Statistics

Publications

4

Citations

709

H-Index

4

Active since

1993

Affiliations

Philips (Netherlands)(Current)

M.J. Verheijen is an author at Philips (Netherlands) specializing in materials engineering, materials science, and materials characterization.

Publications per year

1993–2017

4

Publications

4

Mold-assisted nanolithography: A process for reliable pattern replication

J. Haisma, M.J. Verheijen, Kees van den Heuvel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 656 citations

Engineering, Materials Engineering, Materials Science +11

E-beam Lithography for Digital Holograms

M.J. Verheijen · Journal of Modern Optics · 1993 · 28 citations

Engineering, Electrical Engineering, Optics +14

Lattice relaxation of nanostructured semiconductor pillars observed by high-resolution x-ray diffraction

Paul van der Sluis, M.J. Verheijen, J. Haisma · Applied Physics Letters · 1994 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +17

Automated STEM/EDS Metrology Characterization of 3D NAND Devices

Zhenxin Zhong, Justin Roller, Oleksii Bidiuk et al. · Microscopy and Microanalysis · 2017 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +13

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