M.J. Verheijen

Mold-assisted nanolithography: A process for reliable pattern replication

J. Haisma, M.J. Verheijen, Kees van den Heuvel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 651 citations

Engineering, Mold-assisted Nanolithography, Pattern Transfer +16

E-beam Lithography for Digital Holograms

M.J. Verheijen · Journal of Modern Optics · 1993 · 28 citations

Photonics, Holography, Optical Materials +13

Lattice relaxation of nanostructured semiconductor pillars observed by high-resolution x-ray diffraction

Paul van der Sluis, M.J. Verheijen, J. Haisma · Applied Physics Letters · 1994 · 15 citations

Engineering, Electron-beam Lithography, Silicon On Insulator +20

Automated STEM/EDS Metrology Characterization of 3D NAND Devices

Zhenxin Zhong, Justin Roller, Oleksii Bidiuk et al. · Microscopy and Microanalysis · 2017 · 10 citations

Engineering, Microscopy, Material Innovation +22