J. Haisma

Mold-assisted nanolithography: A process for reliable pattern replication

J. Haisma, M.J. Verheijen, Kees van den Heuvel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 651 citations

Engineering, Mold-assisted Nanolithography, Pattern Transfer +16

Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry

J. Haisma, G. A. C. M. Spierings · Materials Science and Engineering R Reports · 2002 · 97 citations

Materials Science, Materials Engineering, Engineering +9

Diversity and feasibility of direct bonding: a survey of a dedicated optical technology

J. Haisma, Bert A. C. M. Spierings, U. Biermann et al. · Applied Optics · 1994 · 95 citations

Silicon-on-Insulator Wafer Bonding-Wafer Thinning Technological Evaluations

J. Haisma, G. A. C. M. Spierings, U. Biermann et al. · Japanese Journal of Applied Physics · 1989 · 85 citations

Engineering, Integrated Circuits, Thin Film Process Technology +22

Lattice-constant-adaptable crystallographics

D. Mateika, E. Völkel, J. Haisma · Journal of Crystal Growth · 1990 · 53 citations