Namil Koo

Improved mold fabrication for the definition of high quality nanopatterns by Soft UV-Nanoimprint lithography using diluted PDMS material

Namil Koo, Markus Bender, Ulrich Plachetka et al. · Microelectronic Engineering · 2007 · 102 citations

Materials Science, Engineering, Beam Lithography +15

The fabrication of a flexible mold for high resolution soft ultraviolet nanoimprint lithography

Namil Koo, Ulrich Plachetka, Martin Otto et al. · Nanotechnology · 2008 · 51 citations

Liquid transfer imprint lithography: A new route to residual layer thickness control

Namil Koo, Jung Wuk Kim, Martin Otto et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 25 citations

Materials Science, Layer Thickness Control, Engineering +14

Improved CD control and line edge roughness in E-beam lithography through combining proximity effect correction with gray scale techniques

Jens Bolten, T. Wahlbrink, Namil Koo et al. · Microelectronic Engineering · 2009 · 19 citations

Engineering, Proximity Effect Correction, Electron-beam Lithography +6

Lithography potentials of UV-nanoimprint

Andreas Fuchs, Markus Bender, Ulrich Plachetka et al. · Current Applied Physics · 2007 · 18 citations

Materials Science, Engineering, Electron-beam Lithography +9