Improved mold fabrication for the definition of high quality nanopatterns by Soft UV-Nanoimprint lithography using diluted PDMS material - Concepedia

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Improved mold fabrication for the definition of high quality nanopatterns by Soft UV-Nanoimprint lithography using diluted PDMS material

102

Citations

7

References

2007

Year

Namil Koo, Markus Bender, Ulrich Plachetka, Andreas Fuchs, T. Wahlbrink, Jens Bolten, H. Kurz

Microelectronic Engineering

Materials ScienceEngineeringBeam LithographyFlexible ElectronicsNanomaterialsNanotechnologyMicrofabricationFabrication TechniqueHigh Quality NanopatternsPrinted ElectronicsNanolithographyNanofabricationBiomedical EngineeringMold FabricationPdms MaterialNanometrology3D PrintingNanolithography Method

References

	Year	Citations

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